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The unit does not have a wafer chuck installed (see photos)
Part No: LF160 Bellows
Part No: E15006310
img{max-width:100%} ASM 03-320142D03 EV Interface Pneumatic Block PCB Assembly ASM Epsilon 3000 Used
Nikon 4S554-351-3 Processor Board PCB AFU-S40-S10-4CT-N01 NSR-S620D Used Working The unit does not haveNikon 4S554 351 3 Processor Board PCB AFU S40 S10 4CT N01 NSR S620D Used Working Inventory # A 13689 This Nikon 4S554 351 3 is used working surplus. The physical condition is good, but there are signs of previous use and handling. Removed from a Nikon NSR S620D ArF Immersion Scanner System. Specifications Part No: 4S554 351 3 Model No: AFU S40 S10 4CT N01 Removed from a Nikon NSR S620D ArF Immersion Scanner System Made in Japan Sale Details Item
US$ 84.95
US$ 34.95
US$ 69.00